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ASM 03-330690D01 Serial Expansion Interface Board Rev C ASM Epsilon 3200 works
Asyst 12000-67 Robot AXYS Model 21 Robot ASM Epsilon 3200 used working
MKS 153D-20-40-2 Throttle Valve ASM Epsilon 3200 Wafer Transfer Module working
03-141884-01 03-320460D01 ASM Epsilon 3200 MFC I F Board 11 Circuit Board REV D
Vero Monovolt PK60-III CE/PF Power Supply 116-010074H 5V/12A Epsilon 3200 works
MKS Assembly GBR1B24CR1 ASM Epsilon 3200 working
Gesout-3 ASM Epsilon 3200 Circuit Board 03-322711A04 REV D working
Cole-Parmer HC205S-020 Spring Loaded Flow Meter 6000 PSI ASM Epsilon 3200 works
STEC Mass Flow Controller SEC-4500M H2 10 SLM ASM Epsilon 3200 Process Module
Gesdac-2B-9821 ASM Epsilon 3200 Circuit Board 03-322712A04 REV C working
ASM Epitaxy Auxiliary Interface Circuit Board 03-322678C02 ASM Epsilon 3200
Genmark Wafer Transfer Robot ASM Epsilon 3200 Wafer Transfer Module used working
Gesdac-2B-9821 ASM Epsilon 3200 Circuit Board 03-322712A03 REV C working
Edwards NGU078000P Vacuum Switch Box 6XPDM ASM Epsilon 3200 used working
IMC 04320-BT5340V-6 Blower Reactor Cooling Fan 46-106737U33 Epsilon 3200 works
Gespac 8720 GESINP-2A PCB 03-322710A02 Rev B ASM Epsilon 3200 used working
Vero Monovolt PK60-III Power Supply 116-010065J 15V 4A ASM Epsilon 3200 working
03-320142D03 03-188639D01 ASM Epsilon 3200 EV Interface Pneumatic Block
Vero Monovolt PK120 Power Supply 116-010081B 5V 20A ASM Epsilon 3200 working
Gesdac-2B-9821 ASM Epsilon 3200 Circuit Board 03-322712A02 REV C working
VAT 03112-LH24-ABG1 Slit Valve A-510093 ASM Epsilon 3200 working
Vero 116-010064A Monovolt PK60-III CE Power Supply 12V/5A ASM Epsilon 3200 works
ASM Epsilon 3200 Front End Interface used working
Vero 116-010084D Monovolt PK120 Power Supply 24V/5A ASM Epsilon 3200 used workis
Genmark ELVH030413-E1 Robot ASM Epsilon 3200 working
Asyst Controller 9700-5819-01 ASM Epsilon 3200 Etcher working
MKS 627B-15968 Baratron Pressure Transducer 1 TORR ASM Epsilon 3200 used working
Gespac 8720 GESINP-2A PCB 03-322710A03 Rev B ASM Epsilon 3200 used working
Gespac 9310 GESADC-12A PCB 03-323114A03 Rev C ASM Epsilon 3200 used working
STEC Mass Flow Controller SEC-4400M 2%CH3SiH3/H2 300 SCCM ASM Epsilon 3200
Gespac 9821 GESDAC-2B PCB 03-322712A03 Rev D ASM Epsilon 3200 used working
Precise Sensors 4861-65-GA-RM Pressure Transducer Lot of 11 working
Gespac 9821 GESDAC-2B PCB 03-322712A02 Rev D ASM Epsilon 3200 used working
Gespac 8720 GESINP-2A PCB 03-322710A04 Rev B ASM Epsilon 3200 used working
Gespac 9505 GESOUT-3 PCB 03-322711A02 Rev D ASM Epsilon 3200 used working
ACMA ASMA005 Computer 1031-864-01 Rev. B ASM Epsilon 3200 used working
SMV050581 Genmark Robot ASM Epsilon 3200 working
Gespac 9821 GESDAC-2B PCB 03-322712A04 Rev D ASM Epsilon 3200 used working
ASM 03-320460D01 MFC I/F Board PCB Rev D ASM Epsilon 3200 used working
STEC SEC-4400M Mass Flow Controller 1%GeH4/H2 500 SCCM working
ACMA 1031-864-01 Computer ASMA005 ASM Epsilon 3200 Wafer Transfer Module Rev C
Gespac 8915 GESCIO-1 PCB 03-323820A01 Rev E ASM Epsilon 3200 used working
Gespac 9505 GESOUT-3 PCB 03-322711A01 Rev D ASM Epsilon 3200 used working
ASM 03-141884-01 MFC Interface BD II PCB Rev A ASM Epsilon 3200 used working
STEC SEC-4600M Mass Flow Controller H2 100 SLM ASM Epsilon 3200
Genmark ELVH010657-EL2 Robot 95033E004B ASM Epsilon 3200 working
03-320142D03 ASM Epsilon 3200 EV Interface Pneumatic Block Circuit Board REV G
DC Interlock ASM Epsilon 3200 Circuit Board 03-140220-01 REV B working
ASM 03-140485-01 System Interface Board II Rev D ASM Epsilon 3200 used working
Gespac 9310 GESADC-12A PCB 03-323114A02 Rev C ASM Epsilon 3200 used working
03-188692D01 ASM Epsilon 3200 HW INTRL E3000 Circuit Board REV C working
STEC SEC-4400M Mass Flow Controller H2 5 SLM ASM Epsilon 3200
Edwards NRB086000 Helios Gas Abatement Unit ASM Epsilon 3200 used working
Asyst 9700-5819-01 Controller Rev. 005 ASM Epsilon 3200 FEI used working
03-141171-01 ASM Epsilon 3200 Vacuum Controls I F Board PCB REV B working
Gespac 9505 GESOUT-3 PCB 03-322711A03 Rev D ASM Epsilon 3200 used working
MKS GBROR InSitu Flow Verifier Controller GBR1B24CR1 123714-G1 20000 sccm workin
Asyst 9700-5819-01 3 Channel Controller CMS II Rev 4 ASM Epsilon 3200 used works
Asyst 9700-5888-01 3 Channel Controller Rev A ASM Epsilon 3200 used working
ASM 03-189611-01 Vacuum Controls I/F Board Rev A ASM Epsilon 3200 used working
Swagelok SS-DLV51-VCR4 Manual Valve 1/4" Lot of 9 works
Asyst Power Distribution Center 9700-6209-01 ASM Epsilon 3200 FEI used working
IMC 04320-BT5340V-5 Blower Reactor Cooling Fan 46-106737U32 Epsilon 3200 works
Asyst Pre Aligner Model 5 05050-017 ASM Epsilon 3200 Etcher working
ASM 03-188692D01 Assy HW Intrl E3000 PCB Rev D ASM Epsilon 3200 used working
MT1800-TR-ASM Mitsutech Touch Screen ASM Epsilon 3200 Wafer Transfer Module work
VAT 07512-UA24-ADA1 Atmospheric Door Slit Valve ASM Epsilon 3200 used working
NTI Nodemux KVM Switch ST-4U-TS-NBS ASM Epsilon 3200 used working
ASM 03-141171-01 TM I/F BD PCB ASM 3200 Epsilon Wafer Transfer Module working
IMC 04320-BT5340V-5 Blower Reactor Cooling Fan 46-106737A32 Epsilon 3200 works
ASM 03-188692D01 Assy HW Intrl E3000 PCB Rev B ASM Epsilon 3200 used working
ACMA ASMA003 Computer 54-125495A02 Rev. C ASM Epsilon 3200 used working
Genmark EL1 Wafer Cassette Robot ASM Epsilon 3200 Wafer Transfer Module working
VAT 07512-UA24-ADA1 Atmospheric Door Slit Valve Epsilon 3200 missing DE-9 plug
Asyst CPU 6900-2121-01 Smart Plus 3.00.0.1.2.0 ASM Epsilon 3200 used working
Nor-Cal Products ESVP-1002-NWB-S?A Right Angle Valve ASM Epsilon 3200 used works
ASM Epsilon 3200 Wafer Transfer Module Temperature Control Panel used working
VAT 02112-AE24-AAJ1 Slit Valve ASM Epsilon 3200 Wafer Transfer Module used works
Genmark 9800109111 System Controller Large ASM Epsilon 3200 used working
NTI Nodemux KVM Switch ST-4U-TS-NBS-12?V ASM Epsilon 3200 used working
Genmark EL2 Wafer Cassette Robot ASM Epsilon 3200 Wafer Transfer Module working
Hitachi L300P-150HFU2 Inverter 15kW 20HP 380-480V ASM Epsilon 3200 used working
ASM Epsilon 3200 Wafer Transfer Module untested sold as is
ASM Epsilon 3200 Process & Gas Module used untested sold as-is